Details
PrimeNano shielded cantilever probes are designed for scanning Microwave Impedance Microscopy (sMIM) to directly measure local permittivity and conductivity at the nano-scale.
Metal tip:
The probe tip is made of a solid metal pyramid (Ti/W/Au) and connected to the chip electrode via a metal trace.
Co-axial cantilever structure:
The signal metal trace is sandwiched between dielectric layers and then shielded on both sides with a metal coating, forming co-axial structure. The capacitance and resistance are optimized for low loss and high signal waveguide for microwave frequencies.
Tip apex:
Batch fabricated using MEMS fabrication techniques to produce a (metal) tip with tip apex less than 50nm, enabling high spatial resolution.
Various spring constants:
2 type of cantilevers with spring constant of 1 N/m and 8 N/m (nominally). The cantilevers compatible with contact mode, non-contact (resonant)and non-resonant modes
Cantilever Specifications
|
Spring k (N/m |
8 (7-9)
|
Freq (kHz) |
75 (70-80)
|
Length (µm) |
150 (145 -155)
|
Width (µm) |
50 (47-53)
|
Thickness (µm) |
3.6 (3.3 - 3.9)
|
Shape |
Rectangular
|
Material |
Silicon nitride
|
Reflex Coating (nm) |
TiW/Au (500)
|
Tip Specifications
|
Tip radius (nm) |
50+/-10
|
Tip height (µm) |
5 +/- 0.5
|
Front angle (°) |
35 +/- 1
|
Back angle (°) |
35 +/- 1
|
Side angle (°) |
35 +/- 1
|
Tip shape |
Pyramid
|
Tip material |
Silicon nitride
|
Tip coating (nm) |
TiW/Au
|
Untitled Document
Additional Information
Tip Radius |
50 |
Tip Radius |
> 20 nm |
Spring Constant |
8 |
Frequency |
75 |
Compatibility |
blueDrive |
Manufacturer |
Primenano |
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