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Details
PrimeNano shielded cantilever probes are designed for scanning Microwave Impedance Microscopy (sMIM) to directly measure local permittivity and conductivity at the nano-scale.
Metal tip:
The probe tip is made of a solid metal pyramid (Ti/W/Au) and connected to the chip electrode via a metal trace.
Co-axial cantilever structure:
The signal metal trace is sandwiched between dielectric layers and then shielded on both sides with a metal coating, forming co-axial structure. The capacitance and resistance are optimized for low loss and high signal waveguide for microwave frequencies.
Tip apex:
Batch fabricated using MEMS fabrication techniques to produce a (metal) tip with tip apex less than 50nm, enabling high spatial resolution.
Various spring constants:
2 type of cantilevers with spring constant of 1 N/m and 8 N/m (nominally). The cantilevers compatible with contact mode, non-contact (resonant)and non-resonant modes
The probe tip is made of a solid metal pyramid (Ti/W/Au) and connected to the chip electrode via a metal trace.
The signal metal trace is sandwiched between dielectric layers and then shielded on both sides with a metal coating, forming co-axial structure. The capacitance and resistance are optimized for low loss and high signal waveguide for microwave frequencies.
Batch fabricated using MEMS fabrication techniques to produce a (metal) tip with tip apex less than 50nm, enabling high spatial resolution.
2 type of cantilevers with spring constant of 1 N/m and 8 N/m (nominally). The cantilevers compatible with contact mode, non-contact (resonant)and non-resonant modes
| Cantilever Specifications | |
|---|---|
| Spring k (N/m | 8 (7-9) |
| Freq (kHz) | 75 (70-80) |
| Length (µm) | 150 (145 -155) |
| Width (µm) | 50 (47-53) |
| Thickness (µm) | 3.6 (3.3 - 3.9) |
| Shape | Rectangular |
| Material | Silicon nitride |
| Reflex Coating (nm) | TiW/Au (500) |
