Details
PointProbe® Plus XY-alignment Non-Contact / Soft Tapping Mode- Reflex Coating
he XY-auto-alignment probes for Non-Contact / Soft Tapping mode application with a Reflex coating extend the plug-and-fit alignment concept of the Alignment Chip (ALIGN) to 150 µm short cantilevers optimized for non-contact / soft tapping mode applications. Probe exchange with a tip repositioning accuracy of better than ± 8 µmis possible for all probes of the XY-alignment probes series - independent of their cantilever length. This series is adjusted to the tip position of probes with a cantilever length of 225 µm.
The probe offers unique features:
guaranteed tip radius of curvature < 10nm
tip height 10 - 15 µm
highly doped silicon to dissipate static charge
Al coating on detector side of cantilever
chemically inert
high mechanical Q-factor for high sensitivity
tip repositioning accuracy of better than ± 8 µm (in combination with Align ment Chip)
Cantilever Specifications
|
Spring k (N/m |
7.4 (1.2 - 29)
|
Freq (kHz) |
160 (75 - 265)
|
Length (µm) |
150 (140 - 160)
|
Width (µm) |
27 (19.5 - 34.5)
|
Thickness (µm) |
2.8 (1.8 - 3.8)
|
Shape |
rectangular
|
Material |
Silicon
|
Reflex Coating (nm) |
Al (30)
|
Tip Specifications
|
Tip radius (nm) |
7
|
Tip height (µm) |
12.5 +/- 2.5
|
Front angle (°) |
25 +/- 2
|
Back angle (°) |
15 +/- 2
|
Side angle (°) |
22.5 +/- 2
|
Tip shape |
4-sided
|
Tip material |
Silicon
|
Tip coating (nm) |
none
|
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