PPP-XYNCSTR

PointProbe® Plus XY-alignment Non-Contact / Soft Tapping Mode- Reflex Coating

he XY-auto-alignment probes for Non-Contact / Soft Tapping mode application with a Reflex coating extend the plug-and-fit alignment concept of the Alignment Chip (ALIGN) to 150 µm short cantilevers optimized for non-contact / soft tapping mode applications. Probe exchange with a tip repositioning accuracy of better than ± 8 µmis possible for all probes of the XY-alignment probes series - independent of their cantilever length. This series is adjusted to the tip position of probes with a cantilever length of 225 µm.

The probe offers unique features:

guaranteed tip radius of curvature < 10nm

tip height 10 - 15 µm

highly doped silicon to dissipate static charge

Al coating on detector side of cantilever

chemically inert

high mechanical Q-factor for high sensitivity

tip repositioning accuracy of better than ± 8 µm (in combination with Align ment Chip)

Cantilever Specifications
Spring k (N/m	7.4 (1.2 - 29)
Freq (kHz)	160 (75 - 265)
Length (µm)	150 (140 - 160)
Width (µm)	27 (19.5 - 34.5)
Thickness (µm)	2.8 (1.8 - 3.8)
Shape	rectangular
Material	Silicon
Reflex Coating (nm)	Al (30)

Tip Specifications
Tip radius (nm)	7
Tip height (µm)	12.5 +/- 2.5
Front angle (°)	25 +/- 2
Back angle (°)	15 +/- 2
Side angle (°)	22.5 +/- 2
Tip shape	4-sided
Tip material	Silicon
Tip coating (nm)	none