NANOSENSORS™ standard 2D300 is used for very precise x-y-calibration of the scanning mechanism. The standard consists of a 2-dimensional lattice of inverted square pyramids with 300nm pitch etched into a silicon chip.
300 nm pitch
This standard has been developed in close cooperation with the German national authority of standards: PTB (Physikalisch Technische Bundesanstalt). Due to this PTB is able to certify this standard in accordance with international guidelines. Please contact Working Group 5.25 Scanning Probe Metrology at www.ptb.de directly.
|| 5mm x 7mm
|| 100um x 100um
The active area is located in the center of the chip and is surrounded by the FindMe structure. The lattice of inverted pyramids make up the active area.
|Accuracy of pyramid position
|Accuracy of pitch (10um x 10um scan)
|Accuracy of pyramid (100um x 100um scan)
|| +/- 0.01%
|Edge length of square pyramids
|| ~ 50 nm
|Sidewall angle (versus wafer surface)
|Accuracy of sidewall angle
|Depth of pyramids
|| ~ 70nm