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Quick Overview

Nanosensors Calibration Standard for the x-y calibration of the scanning mechanism, lattice of inverted pyramids, 200nm pitch.

5mm x 7mm Si die  , 200 nm pitch
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(Ships in 3 Weeks)


NANOSENSORS™ standard 2D200 is used for very precise x-y-calibration of the scanning mechanism. The standard consists of a 2-dimensional lattice of inverted square pyramids with 200nm pitch etched into a silicon chip.

  • 200 nm pitch
  • high accuracy

  • This standard has been developed in close cooperation with the German national authority of standards: PTB (Physikalisch Technische Bundesanstalt). Due to this PTB is able to certify this standard in accordance with international guidelines. Please contact Working Group 5.25 Scanning Probe Metrology at directly.

    Chip Size     5mm x 7mm
    Active area     100um x 100um

    The active area is located in the center of the chip and is surrounded by the FindMe structure. The lattice of inverted pyramids make up the active area.
    Pitch     200nm
    Accuracy of pyramid position     10nm
    Accuracy of pitch (10um x 10um scan)     0.1%
    Accuracy of pyramid (100um x 100um scan)     +/- 0.01%
    Edge length of square pyramids     ~ 50 nm
    Sidewall angle (versus wafer surface)     54.7°
    Accuracy of sidewall angle     0.5
    Depth of pyramids     ~ 70nm

    Untitled Document

    Additional Information

    Tip Radius No
    Tip Radius No
    Spring Constant No
    Frequency No
    Compatibility No
    Manufacturer Nanosensors

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